{"id":269,"date":"2018-11-26T12:45:57","date_gmt":"2018-11-26T12:45:57","guid":{"rendered":"https:\/\/dev.learning.northumbria.ac.uk\/dev\/about\/"},"modified":"2025-07-22T09:41:50","modified_gmt":"2025-07-22T08:41:50","slug":"about","status":"publish","type":"page","link":"https:\/\/hosting.northumbria.ac.uk\/tf-fab\/about\/","title":{"rendered":"About"},"content":{"rendered":"\t\t
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ABOUT<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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Our Facility<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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TF-FAB is a dual chamber magnetron sputtering system with interconnecting load loack. A general overview is shown below.<\/p>\n

Common characteristics include 6” susbtrate handling, 800C substrate heater, 2x quartz crystal monitor per chamber, 4x 3” magnetron sources (sputter up) and 3x dedicated lines for processing gases (argon, nitrogen and oxygen). Each chamber has 4 dedicated power supplies which can be connected to any source in that chamber. The system comes with a 6-wavelength ellipsometer to monitor the growing films. The ellipsometer can mounted on either chamber for in-situ monitoring but can also be used ex-situ with a dedicated platform. Further chamber specific specifications include:<\/span><\/p>\n

Process chamber 1 (LHS, PC1): 1 x RF, 2 x DC and 1 x p-DC power power supplies, RF substrate biasing with the source power supply, glancing angle holder insert to grow nanostructures.<\/p>\n

Process chamber 2 (RHS, PC2): 1 x DC, 2 x p-DC and 1 x HiPIMS power supplies. RF and DC susbtrate biasing via dedicated power supplies. A 4th gas line is included for gas injection close to the target for light element doping.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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Investigators<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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\"\"<\/a><\/figure>

Prof. Guillaume Zoppi<\/a><\/h3>

Principal investigator and responsible for project delivery and management<\/p><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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\"\"<\/a><\/figure>

Prof. Vincent Barrioz<\/a><\/h3>

Co-investigator and responsible for Energy Materials user group<\/p><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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\"\"<\/a><\/figure>

Prof. Neil Beattie<\/a><\/h3>

Co-investigator and responsible for impact activities<\/p><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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\"\"<\/a><\/figure>

Prof. Martin Birkett<\/a><\/h3>

Co- investigator and responsible for Biocompatible Materials user group<\/p><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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\"\"<\/a><\/figure>

Prof. Hamdi Torun<\/a><\/h3>

Co-investigator and responsible for Functional Materials user group<\/p><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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\"\"<\/a><\/figure>

Dr Cecil Cherian Lukose<\/a><\/h3>

Scientific Officer and responsible for day-to-day running of TF-FAB<\/p><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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Customers & Users<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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<\/div>\n\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"

ABOUT Our Facility TF-FAB is a dual chamber magnetron sputtering system with interconnecting load loack. A general overview is shown below. Common characteristics include 6” susbtrate handling, 800C substrate heater, […]<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"no-sidebar","site-content-layout":"page-builder","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"disabled","ast-breadcrumbs-content":"","ast-featured-img":"disabled","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"enabled","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"class_list":["post-269","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/hosting.northumbria.ac.uk\/tf-fab\/wp-json\/wp\/v2\/pages\/269","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/hosting.northumbria.ac.uk\/tf-fab\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/hosting.northumbria.ac.uk\/tf-fab\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/hosting.northumbria.ac.uk\/tf-fab\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/hosting.northumbria.ac.uk\/tf-fab\/wp-json\/wp\/v2\/comments?post=269"}],"version-history":[{"count":161,"href":"https:\/\/hosting.northumbria.ac.uk\/tf-fab\/wp-json\/wp\/v2\/pages\/269\/revisions"}],"predecessor-version":[{"id":2991,"href":"https:\/\/hosting.northumbria.ac.uk\/tf-fab\/wp-json\/wp\/v2\/pages\/269\/revisions\/2991"}],"wp:attachment":[{"href":"https:\/\/hosting.northumbria.ac.uk\/tf-fab\/wp-json\/wp\/v2\/media?parent=269"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}